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Technologie Hochintegrierter Schaltungen by Dietrich Widmann, Hans Friedrich, Hermann Mader (Hardcover, 1996)

About this product

About this product

Product Information

Dieses Buch beschreibt kompetent und umfassend die aktuellen Technologien zur Herstellung von hochintegrierten Schaltungen bis zur Prozessintegration fur den 256-Mbit-Speicher. Es wendet sich damit an fortgeschrittene Studenten sowie Ingenieure und Naturwissenschaftler in Forschung, Entwicklung und Fertigung. Die gewaltigen Entwicklungen in der Prozesstechnologie der letzten Jahre finden sich in dieser Neuauflage wieder: Planarisierungstechniken, neue Materialien wie Refraktarmetalle, modernste Prozessarchitekturen fur CMOS-, Bipolar-, BICMOS- und Smart-Power-Technologien. Hinzu kommen wesentlich verbesserte Einzelprozesse in Schichttechnik, Lithographie, AEtztechnik und Dotiertechnik mit selbstjustierenden Verfahren. Die Autoren, selbst aktiv an diesen Fortschritten beteiligt, geben Informationen aus erster Hand.

Product Identifiers

Publisher
Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
ISBN-13
9783540593577
eBay Product ID (ePID)
105236653

Product Key Features

Subject Area
Mechanical Engineering, Nanotechnology, Electrical Engineering
Author
Dietrich Widmann, Hans Friedrich, Hermann Mader
Publication Name
Technologie Hochintegrierter Schaltungen
Format
Hardcover
Language
German
Subject
Engineering & Technology, Education
Publication Year
1996
Type
Textbook
Number of Pages
366 Pages

Dimensions

Volume
19

Additional Product Features

Title_Author
Dietrich Widmann, Hans Friedrich, Hermann Mader
Series Title
Halbleiter-Elektronik
Country/Region of Manufacture
Germany

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