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About this product
- DescriptionThe concept of micromachining of silicon to form micron-scale structures such as cantilevers, free-standing bridges, membranes, and channels and its combination with microelectronics fabrication methodology and techlogy has resulted in the em- gence of a new category of functional systems called MEMS (microelectomechanical systems). MEMS are miniature systems containing devices or arrays of devices that combine electronics with other components such as sensors, transducers and actuators, and are fabricated by IC (Integrated Circuits) batch processing techniques. The ?eld of electroceramics (irganic, n-metallic materials, often polycr- talline, with useful electrical and other functional properties) provides a vast number of active materials for sensors, actuators, and electrical and electronic components. Electroceramic thin ?lms can add therefore many useful functionalities to MEMS. At the same time, because the fabrication of ceramics is commonly a high temperature process that often necessitates an oxygen containing atmosphere, because most cer- ics are inert and corrosion resistant, and because the properties of electroceramics are verysensitivetotheprocessingconditions,theintegratiofelectroceramiclayersonto silicon or other substrates and their patterning into functional elements need complex techlogies that are still under development. This situation is re?ected in the current positiofelectroceramic-basedMEMSinthemarket:Whilethepotentialisexcellent, ?rst devices are being commercialized only these present days.
- PublisherSpringer-Verlag New York Inc.
- Date of Publication03/03/2005
- SubjectElectronics Engineering & Communications Engineering
- Series TitleElectronic Materials: Science and Technology
- Series Part/Volume Numberv. 9
- Place of PublicationNew York, NY
- Country of PublicationUnited States
- ImprintSpringer-Verlag New York Inc.
- Content Notebiography
- Weight774 g
- Width156 mm
- Height234 mm
- Spine23 mm
- Edited byNava Setter
- Format DetailsLaminated cover
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