How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, high-density gas sensor arrays that can overcome problems relative to high power consumption. Low power consumption is a prerequisite for any type of sensor system to operate at optimum efficiency. Focused on fabrication-friendly microelectromechanical systems (MEMS) and other areas of sensor techlogy, MEMS and Natechlogy for Gas Sensors explores the distinct advantages of using MEMS in low power consumption, and provides extensive coverage of the MEMS/natechlogy platform for gas sensor applications. This book outlines the microfabrication techlogy needed to fabricate a gas sensor on a MEMS platform. It discusses semiconductors, graphene, nacrystalline ZnO-based microfabricated sensors, and nastructures for volatile organic compounds. It also includes performance parameters for the state of the art of sensors, and the applications of MEMS and natechlogy in different areas relevant to the sensor domain. In addition, the book includes: * An introduction to MEMS for MEMS materials, and a historical background of MEMS * A concept for cleanroom techlogy * The substrate materials used for MEMS * Two types of deposition techniques, including chemical vapour deposition (CVD) * The properties and types of photoresists, and the photolithographic processes * Different micromachining techniques for the gas sensor platform, and bulk and surface micromachining * The design issues of a microheater for MEMS-based sensors * The synthesis technique of a nacrystalline metal oxide layer * A detailed review about graphene; its different deposition techniques; and its important electronic, electrical, and mechanical properties with its application as a gas sensor * Low-cost, low-temperature synthesis techniques * An explanation of volatile organic compound (VOC) detection and how relative humidity affects the sensing parameters MEMS and Natechlogy for Gas Sensors provides a broad overview of current, emerging, and possible future MEMS applications. MEMS techlogy can be applied in the automotive, consumer, industrial, and biotechlogy domains.
Sunipa Roy is assistant professor of electronics and telecommunications engineering at Guru Nanak Institute of Technology, Calcutta, India. She received her M.Tech in VLSI and microelectronics from West Bengal University of Technology in 2009, and her Ph.D in engineering from Jadavpur University in 2014. She has served as a fellow of the Council of Scientific and Industrial Research (India), is a member of the Institution of Engineers (India), and a member of the IEEE. She has also presented numerous papers in journals and conferences. Her research interests include MEMS, nanotechnology, and graphene and its application as a gas sensor. Chandan Kumar Sarkar is professor of electronics and telecommunications engineering at Jadavpur University, Calcutta, India. He received his B.Sc (Hons) and M.Sc in physics from Aligarh Muslim University, India in 1975, earned his Ph.D from Calcutta University in 1979, and his D.Phil from the University of Oxford, UK in 1984. In 1980, Dr. Sarkar received the British Royal Commission Fellowship to work at the University of Oxford. He worked as a visiting scientist at the Max Planck Laboratory in Stuttgart, Germany, and at Linkoping University in Sweden. He also taught in the Department of Physics at the University of Oxford.
Chandan Kumar Sarkar, Sunipa Roy
Taylor & Francis Inc
Date of Publication
Technology: General & Reference
Place of Publication
Country of Publication
91 black & white illustrations, 9 black & white tables