This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechlogy, ranging from ion beam micromachining to x-ray lithography.
Raja Nassar, Weizhong Dai
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Date of Publication
Microtechnology and MEMS
Place of Publication
Country of Publication
Springer-Verlag Berlin and Heidelberg GmbH & Co. K