This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of kwledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
A. Ledwith, S.J. Moss
Kluwer Academic Publishers Group
Date of Publication
Engineering & Technology: Textbooks & Study Guides