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Fabrication Engineering at the Micro- and Nanoscale by Stephen A. Campbell (Paperback, 2012)

About this product

About this product

Product Information

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Product Identifiers

Publisher
Oxford University Press Inc
ISBN-13
9780199861224
eBay Product ID (ePID)
182896609

Product Key Features

Author
Stephen A. Campbell
Publication Name
Fabrication Engineering at the Micro- and Nanoscale
Format
Paperback
Language
English
Subject
Engineering & Technology
Publication Year
2012
Type
Textbook
Number of Pages
688 Pages

Dimensions

Item Height
236mm
Item Width
192mm
Item Weight
1221g

Additional Product Features

Title_Author
Stephen A. Campbell
Series Title
The Oxford Series in Electrical and Computer Engineering
Country/Region of Manufacture
United States

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