The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Product Identifiers
Publisher
William Andrew Publishing
ISBN-13
9780815514992
eBay Product ID (ePID)
103860473
Product Key Features
Subject Area
Mechanical Engineering
Author
Eugene a Irene, Harland Tompkins
Publication Name
Handbook of Ellipsometry
Format
Hardcover
Language
English
Subject
Physics
Publication Year
2005
Type
Textbook
Number of Pages
886 Pages
Dimensions
Item Height
229mm
Item Width
152mm
Item Weight
1470g
Additional Product Features
Title_Author
Harland Tompkins, Eugene a Irene
Country/Region of Manufacture
United States
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