Dielectric Films for Advanced Microelectronics by Martin Green, Mikhail Baklanov, Karen Maex (Hardcover, 2007)

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Series Preface. (Mikhail Baklanov, Martin Green and Karen Maex). Low and Ultralow Dielectric Constant Films Prepared by Plasma-Enhanced Chemical Vapor Deposition. (A. Grill). Spin-On Dielectric Materials.