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Ellipsometry for Industrial Applications by Karl Riedling (Paperback, 1987)

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Product Information

During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This volume endeavours to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic in situ measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic in situ measurements are suggested.

Product Identifiers

Publisher
Springer Verlag Gmbh
ISBN-13
9783211820407
eBay Product ID (ePID)
94287216

Product Key Features

Subject Area
Material Science, Mechanical Engineering
Author
Karl Riedling
Publication Name
Ellipsometry for Industrial Applications
Format
Paperback
Language
English
Subject
Engineering & Technology, Chemistry, Science, Physics
Publication Year
1987
Type
Textbook
Number of Pages
99 Pages

Dimensions

Item Height
244mm
Item Width
170mm
Item Weight
240g

Additional Product Features

Title_Author
Karl Riedling
Country/Region of Manufacture
Austria

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Ellipsometry for Industrial Applications by Karl Riedling (Paperback, 1987)

About this product

Product Information

Product Identifiers

Product Key Features

Dimensions

Additional Product Features

Best Selling in Adult Learning & University

Permaculture: A Designer's Manual by Bill Mollison (Hardcover, 1988)

Australian Native Bee Book: Keeping Stingless Bee Hives for Pets, Pollination and Sugarbag Honey by Tim Heard (Paperback, 2015)

The Weed Forager's Handbook: A Guide to Edible and Medicinal Weeds in Australia by Adam Grubb, Annie Raser-Rowland (2012, Paperback)

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