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Nanofabrication: Techniques and Principles by Steven Dew, Maria Stepanova (Hardcover, 2011)

About this product

About this product

Product Information

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Product Identifiers

Publisher
Springer Verlag Gmbh
ISBN-13
9783709104231
eBay Product ID (ePID)
111463764

Product Key Features

Subject Area
Nanotechnology
Author
Steven Dew, Maria Stepanova
Publication Name
Nanofabrication: Techniques and Principles
Format
Hardcover
Language
English
Subject
Engineering & Technology, Physics
Publication Year
2011
Type
Textbook
Number of Pages
344 Pages

Dimensions

Item Height
235mm
Item Width
155mm
Item Weight
694g

Additional Product Features

Editor
Maria Stepanova, Steven Dew
Country/Region of Manufacture
Austria

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