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Silicon Carbide Microsystems for Harsh Environments by Muthu Wijesundara, Robert Azevedo (Paperback, 2013)

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About this product

Product Information

Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Product Identifiers

Publisher
Springer-Verlag New York Inc.
ISBN-13
9781461428824
eBay Product ID (ePID)
189580516

Product Key Features

Author
Muthu Wijesundara, Robert Azevedo
Publication Name
Silicon Carbide Microsystems for Harsh Environments
Format
Paperback
Language
English
Subject
Engineering & Technology, Physics
Publication Year
2013
Type
Textbook
Number of Pages
232 Pages

Dimensions

Item Height
235mm
Item Width
155mm
Volume
22
Item Weight
385g

Additional Product Features

Title_Author
Muthu Wijesundara, Robert Azevedo
Series Title
Mems Référence Shelf
Country/Region of Manufacture
United States

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