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Technology of Si, Ge, and SiC / Technologie Von Si, Ge Und SiC by W. Dietze, A. Ludsteck, Hermann Mader, W. Munch, Andre Muhlbauer, L. Schleicher, W. Langheinrich, H. Runge, P. Glasow, E. Doering (Hardcover, 1983)