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Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures by Joachim Fruhauf (Hardcover, 2004)

About this product

About this product

Product Information

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Product Identifiers

Publisher
Springer-Verlag Berlin and Heidelberg Gmbh & Co. Kg
ISBN-13
9783540221098
eBay Product ID (ePID)
94986625

Product Key Features

Subject Area
Material Science, Chemical Engineering, Manufacturing Engineering
Author
Joachim Fruhauf
Publication Name
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
Format
Hardcover
Language
English
Subject
Engineering & Technology
Publication Year
2004
Type
Textbook
Number of Pages
222 Pages

Dimensions

Item Height
235mm
Item Width
155mm
Item Weight
1140g

Additional Product Features

Title_Author
Joachim Fruhauf
Country/Region of Manufacture
Germany

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