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Handbook of Advanced Semiconductor Technology and Computer Systems <|
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Item specifics
- Condition
- PublishedOn
- 2012-06-24
- Title
- Handbook of Advanced Semiconductor Technology and Computer Syste
- ISBN
- 9789401170581
- Publication Name
- Handbook of Advanced Semiconductor Technology and Computer Systems
- Publisher
- Springer
- Subject
- Education
- Publication Year
- 2012
- Series
- Van Nostrand Reinhold Electrical/Computer Science and Engineering Series
- Type
- Study Guide
- Format
- Paperback
- Language
- English
- Item Height
- 235 mm
- Item Weight
- 1442 g
- Item Width
- 155 mm
- Number of Pages
- 942 Pages
About this product
Product Information
Chapter I describes deposition as a basic microelectronics technique. Plasma enhanced chemical vapor deposition (PECVD) is a technique widely accepted in microelectronics for the deposition of amorphous dielectric films such as silicon nitride and silicon oxide. The main advantage of PECVD stems from the intro duction of plasma energy to the CVD environment, which makes it possible to promote chemical reactions at relatively low temperatures. A natural extension of this is to use this plasma energy to lower the temperature required to obtain a crystalline deposit. This chapter discusses the PECVD technique and its ap plication to the deposition of dielectric, semiconductor, and conductor films of interest to microelectronics. Chapter 2 acquaints the reader with the technology and capabilities of plasma processing. Batch etching reactors and etching processes are approaching ma turity after more than ten years of development. Requirements of anisotropic and selective etching have been met using a variety of reactor configurations and etching gases. The present emphasis is the integration of plasma etching processes into the overall fabrication sequence. Chapter 3 reviews recent advances in high pressure oxidation technology and its applications to integrated circuits. The high pressure oxidation system, oxi dation mechanisms, oxidation-induced stacking faults, impurity segregation, and oxide quality are described. Applications to bipolar and MOS devices are also presented.
Product Identifiers
Publisher
Springer
ISBN-13
9789401170581
eBay Product ID (ePID)
209439850
Product Key Features
Number of Pages
942 Pages
Language
English
Publication Name
Handbook of Advanced Semiconductor Technology and Computer Systems
Publication Year
2012
Subject
Education
Type
Study Guide
Series
Van Nostrand Reinhold Electrical/Computer Science and Engineering Series
Format
Paperback
Dimensions
Item Height
235 mm
Item Weight
1442 g
Item Width
155 mm
Additional Product Features
Country/Region of Manufacture
Netherlands
Item description from the seller
Business seller information
Value Added Tax number:
- GB 724498118
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