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The Physics of Microfabricati
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- Buy It NowThe Physics of Microfabrication, Brodie, Ivor,Muray, Julius J., Very Good
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eBay item number:314298179955
Item specifics
- Condition
- Book Title
- The Physics of Microfabrication
- ISBN
- 306408635
- Publication Year
- 1982
- Type
- Textbook
- Format
- Hardcover
- Subject Area
- Material Science, Electrical Engineering
- Language
- English
- Publication Name
- The Physics of Microfabrication
- Item Height
- 234mm
- Publisher
- Springer Science+Business Media
- Item Width
- 156mm
- Item Weight
- 2010g
- Number of Pages
- 504 Pages
About this product
Product Information
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Product Identifiers
Publisher
Springer Science+Business Media
ISBN-13
9780306408632
eBay Product ID (ePID)
90279748
Product Key Features
Subject Area
Material Science, Electrical Engineering
Publication Name
The Physics of Microfabrication
Format
Hardcover
Language
English
Publication Year
1982
Type
Textbook
Number of Pages
504 Pages
Dimensions
Item Height
234mm
Item Width
156mm
Item Weight
2010g
Additional Product Features
Country/Region of Manufacture
United States
Item description from the seller
Business seller information
Value Added Tax number:
- GB 714074459
Seller assumes all responsibility for this listing.
eBay item number:314298179955
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Sorry for "rating the item" at 3*, but I have not yet read this book. eBay's new policy does not allow feedback without star rating and review for the product, so I leave 3* for any book not yet read. eBay trashed their reviews (to which I had contributed) and think this a substitute, but we now have a "system" that want an instant, uneditable review. The book arrived, is in a readable condition as described, and I am more than happy with my purchase. Many thanks.
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