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Acs Professional Reference Book Ser.: Introduction to Microlithography by C. Grant Willson (1994, Hardcover)
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About this product
Product Identifiers
PublisherAmerican Chemical Society
ISBN-100841228485
ISBN-139780841228481
eBay Product ID (ePID)938058
Product Key Features
Number of Pages540 Pages
LanguageEnglish
Publication NameIntroduction to Microlithography
SubjectElectronics / Semiconductors, Chemistry / Physical & Theoretical, Chemistry / Organic, Industrial Technology
Publication Year1994
FeaturesRevised
TypeTextbook
Subject AreaTechnology & Engineering, Science
AuthorC. Grant Willson
SeriesAcs Professional Reference Book Ser.
FormatHardcover
Dimensions
Item Height1.4 in
Item Weight30.5 Oz
Item Length9.1 in
Item Width6.2 in
Additional Product Features
Edition Number2
Intended AudienceCollege Audience
LCCN93-042023
Dewey Edition20
Dewey Decimal621.3815/31
Edition DescriptionRevised edition
Table Of ContentL.F. Thompson: An Introduction to LithographyM.J. Bowden: The Lithographic Process: The PhysicsC.G. Willson: Organic Resist MaterialsL.F. Thompson: Resist ProcessingJ.A. Mucha, D.W. Hess, and E.S. Aydil: Plasma Etching
SynopsisUpdated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also proveinvaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography., Updated and expanded Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
LC Classification NumberTR940.I57 1994
