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Design of a Monolithic 3dof Mems Capacitive Accelerometer by Muhammad Shuja Khan (Paperback, 2011)

About this product

About this product

Product Information

Sensors and devices, based on micromachining technology, known as micro-electro-mechanicalsystems or MEMS, have been received increasing attention so far in recent years. Micromachined inertial sensors, consisting of accelerometers and gyroscopes, are one of the most important types of silicon-based sensor. MEMS capacitive accelerometers have been extensively used in automobiles, inertial navigation systems, earth quake detection and many other bio-medical applications. This book deals with the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis Accelerometers on a single substrate and utilizes a surface micromachining technology using standard PolyMUMPs process. The designed accelerometer is 3mmx3.1mm in size, has low mechanical noise floor, high sense capacitance and high sensitivity along in-plane (x and y) and out-of-plane (z) axes. Performing a detailed finite element analysis in ANSYS 11.o, physical level simulation has been done to verify the deflection for x, y and z axes with respect to the applied acceleration (g).

Product Identifiers

Publisher
Lap Lambert Academic Publishing
ISBN-13
9783845409528
eBay Product ID (ePID)
109213775

Product Key Features

Author
Muhammad Shuja Khan
Publication Name
Design of a Monolithic 3dof Mems Capacitive Accelerometer
Format
Paperback
Language
English
Subject
Engineering & Technology
Publication Year
2011
Type
Textbook
Number of Pages
92 Pages

Dimensions

Item Height
229mm
Item Width
152mm
Item Weight
145g

Additional Product Features

Title_Author
Muhammad Shuja Khan
Country/Region of Manufacture
Germany

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