Silicon Nanoelectronics by Taylor & Francis Inc (Hardback, 2005)

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Title: Silicon Nanoelectronics. Nanotechnology may provide novel devices to avoid the problem, such as single-electron devices, carbon nanotubes, silicon nanowires, and new materials. Silicon nanodevices are particularly promising because of the existing silicon process, the infrastructure in semiconductor industries, and the compatibility of CMOS circuits and nearly perfect interface between the natural oxide and silicon.
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